Backscattered Electron and X-ray (BEX) imaging is a new technique for Scanning Electron Microscopy (SEM) which acquires data simultaneously from both Backscattered Electron (BSE) sensors and X-ray sensors, such as silicon drift detector. This results in high-resolution, colour images which contain topographic, crystallographic, and compositional information; acquired with the low dwell times of an imaging system and whilst operating at ‘standard’ SEM imaging conditions.
